这个词是什么意思？
Manufacturing technology for making microscopic devices in the micrometer range (typically 1-100 micrometers), such as integrated circuits or MEMS. The process usually involves replication and parallel fabrication of hundreds or millions of identical structures using various thin film deposition techniques and carried out in environmentally-controlled clean rooms.
中文名称索引；定义为 MeSH 英文原文，尚未逐条译审。MESH:D055616 · MeSH 2026。
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